JPH0438050U - - Google Patents

Info

Publication number
JPH0438050U
JPH0438050U JP8106790U JP8106790U JPH0438050U JP H0438050 U JPH0438050 U JP H0438050U JP 8106790 U JP8106790 U JP 8106790U JP 8106790 U JP8106790 U JP 8106790U JP H0438050 U JPH0438050 U JP H0438050U
Authority
JP
Japan
Prior art keywords
arm
cassette
height
board
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8106790U
Other languages
English (en)
Japanese (ja)
Other versions
JP2515325Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8106790U priority Critical patent/JP2515325Y2/ja
Publication of JPH0438050U publication Critical patent/JPH0438050U/ja
Application granted granted Critical
Publication of JP2515325Y2 publication Critical patent/JP2515325Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP8106790U 1990-07-30 1990-07-30 基板の搬出・搬入装置 Expired - Fee Related JP2515325Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8106790U JP2515325Y2 (ja) 1990-07-30 1990-07-30 基板の搬出・搬入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8106790U JP2515325Y2 (ja) 1990-07-30 1990-07-30 基板の搬出・搬入装置

Publications (2)

Publication Number Publication Date
JPH0438050U true JPH0438050U (en]) 1992-03-31
JP2515325Y2 JP2515325Y2 (ja) 1996-10-30

Family

ID=31626682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8106790U Expired - Fee Related JP2515325Y2 (ja) 1990-07-30 1990-07-30 基板の搬出・搬入装置

Country Status (1)

Country Link
JP (1) JP2515325Y2 (en])

Also Published As

Publication number Publication date
JP2515325Y2 (ja) 1996-10-30

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Legal Events

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LAPS Cancellation because of no payment of annual fees